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Polyimide Electrostatic Chuck - List of Manufacturers, Suppliers, Companies and Products

Polyimide Electrostatic Chuck Product List

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[Demo unit available for loan] Polyimide electrostatic chuck

Contributes to maintaining cleanliness! Used in semiconductor manufacturing equipment and display manufacturing equipment, etc.

The "Polyimide Electrostatic Chuck" generates fewer particles due to wear and contributes to maintaining cleanliness because it has no moving parts. It can grip thin or easily deformable products without applying stress, and when used for transporting wafers or glass, it can operate with power consumption of less than 1W. Additionally, the gripping force is effective not only in the atmosphere but also in a vacuum. It is also adopted in equipment that combines atmospheric and vacuum processes. 【Features】 ■ Clean device ■ Low damage ■ Usable in a vacuum ■ Low power consumption *For more details, please refer to the PDF document or feel free to contact us.

  • Chuck
  • Other conveying machines
  • Transport and handling robots

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